ION MILLING

Ion milling is used in the physical sciences to enhance the sample’s surface characteristics. Inert gas, typically argon, is ionized and then accelerated toward the sample surface. By means of momentum transfer, the impinging ions sputter material from the sample at a controlled rate.

Advanced sample preparation

For many of today’s advanced materials, analysis by SEM is an ideal technique for rapidly studying material structure and properties. Fischione Model 1061 SEM Mill is an excellent tool for creating
the sample surface characteristics needed for SEM imaging and analysis.

Accepts large sample sizes

The SEM Mill accepts the following sample sizes:

• Cross section* Maximum:
  0.39 x 0.39 x 0.157 in. (10 x 10 x 4.0 mm)
  Minimum:
  0.12 x 0.12 x 0.028 in. (3 x 3 x 0.7 mm)
• Planar
  1.25 in. diameter x 1 in. height (32 x 25 mm)
  Automatic sample thickness sensing maximizes throughput, while magnetic encoding provides absolute positioning accuracy.

Cross-section station (optional)

The Fischione Instruments’ Cross-section station is a tool for creating pristine cross-section samples ready for ion milling in the SEM Mill.

The station enables precise positioning of the area of interest and can be used with a wide variety of materials, including semiconductor devices, multilayers, ceramics, and hard/brittle materials. e prepared region of interest is at and free from damage for subsequent SEM imaging and analysis.

High-quality cross-section samples can be produced quickly and easily by xing a mask to a sample in the user-friendly loading station. is sample preparation method preserves the quality of the inner layers and allows imaging and analysis of the material in its native state.

The station is designed to accommodate a wide range of sample sizes; the alignment of the mask and the sample is done both laterally and angularly.

CROSS-SECTION SAMPLES MADE EASY – Fischione Instruments’ Cross-section
station (top) is an optional tool for the fast creation of pristine cross-section samples. The station allows precise positioning of the area of interest (middle) – x, y, and θ. The resulting cross-section sample (bottom) is ready for ion milling in the Model 1061 SEM Mill.

Quick sample transfer

The SEM Mill features a vacuum load lock
for rapid sample exchange. e load lock is ergonomically designed; simply lift the load lock cover to load the sample holder onto the stage.

Replace the cover and evacuation of the load lock occurs within a few seconds. e vacuum secures the load lock cover in place during ion milling. An electronically controlled elevator then moves the sample into the milling position.

At the conclusion of the milling process, the sample holder returns to the load lock, but remains under vacuum until vented by the user. Venting takes only a few seconds.

Vacuum or inert gas transfer capsule (optional)
An optional vacuum capsule allows you to transfer the sample to the SEM under vacuum or in an inert gas.

Precise angle adjustment

The ion sources are tilted to provide the desired milling angle. e continuously adjustable ion source tilt angles range from 0 to +10°. e ion source angles are adjusted using the left and right ion source controls.

You may choose to use one or both of the TrueFocus ion sources. If you are using both ion sources, you can adjust the beam angles independently.

When both ion beams are directed to one of the sample’s surfaces, milling rates are doubled; this capability is useful for applications such as planar polishing of samples.

Automated milling angle adjustment (optional)
Automated milling angle adjustment using the touch screen is an available option for the SEM Mill. Adding this capability enables you to create multi-step milling sequences that include the automatic adjustment of milling angles throughout the milling process.

MILLING ANGLE ADJUSTMENT

The base Model 1061 SEM Mill is equipped with manually adjustable milling angle controls for both ion sources. The milling angle of each ion source is independently adjustable. Automated milling angle adjustment, which is controlled through the SEM Mill’s touch screen, is optional.

Chamber

The SEM Mill’s vacuum chamber remains under continuous vacuum during operation. A load lock isolates the high chamber vacuum from ambient during sample exchange, ensuring optimal vacuum conditions.

Programmable sample motion

Sample rotation is 360° with variable rotation speed and a sample rocking feature. The instrument automatically senses the sample thickness and establishes the milling plane, which maximizes throughput. A magnetic encoder provides absolute positioning accuracy.

Integrated stage cooling (optional)

Although milling at low angles with low ion beam energies reduces sample heating, temperature-sensitive samples may require further cooling. Liquid nitrogen cooling of the sample stage is very e ective in eliminating heat-induced artifacts. The SEM Mill can achieve temperatures better than -170 °C.

The SEM Mill’s liquid nitrogen system features a dewar located within the enclosure that is fully integrated and interlocked. The dewar is positioned near the operator for easy access. Two dewar options are available: a standard dewar for applications that require 3 to 5 hours of cooling during ion milling, or an extended dewar for applications that require 18+ hours of operation under cryogenic conditions. Temperature is continuously displayed on the touch screen.

Automatic termination

The ion milling process can be automatically terminated by elapsed time or by temperature.
Time
A timer allows milling to continue for a predeter- mined time and then turns o the energy to the ion sources when the time has elapsed. The sample remains under vacuum until the load lock is vented.
Temperature
The thermal safeguard associated with the sample cooling system will stop the process if the sample stage reaches a preset temperature.