Evactron PRS-u
High-Vacuum Compatible Plasma Radical Source
The makers of the popular Evactron® remote plasma cleaning device, the Evactron® De-ContaminatorTM, introduce a system that brings their proven carbon contamination removal technology to end users and tool manufacturers in high vacuum environments. Carbon contamination degrades the perfor- mance and quality of many high vacuum analytical tools such as XPS and Auger Spectrometers.
The Evactron® PRS-uTM was specifically developed to address the cleaning challenges present in high vacuum environments.
Features & Benefits
- Just use air for oxygen radicals, or use other gases for alternative plasma processes
- Impedance matched
- MicroPirani Gauge
- CF 2.75 flange attaches to vacuum chamber
- All metal, welded fittings and connections on vacuum side
- SMC 2-way high vacuum shut-off valve
- 3-way valve for toggle between clean and purge
- Compliant with SEMI-S2, CE and NRTL Safety Standards
- Compatible with both the Desktop and Rack-mounted Configurations of Evactron 25, 40, and 45 Controllers