Evactron® 25Z Zephyr De-Contaminator™
The Fastest Plasma Cleaner Commercially Available
This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Z Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.
The Evactron® 25Z Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. The Evactron Model 45 De-Contaminator can also be upgraded to the Zephyr cleaning.
Features & Benefits
- Clean chambers at turbo pump pressures
- 5-20 Watts RF power
- ≥10x improved cleaning rate
- One button operation
- 1-50 mTorr operating pressure
- No stress to the turbo molecular pump
- Safely de-contaminates the chamber without damage to sensitive components
- Shorter cleaning time, giving increased production with less system down time
- Cleans chamber while in “pump down”
- Increased mean free path, yet ion damage free
