Evactron® 25Z Zephyr De-Contaminator™

The Fastest Plasma Cleaner Commercially Available

This easy to use tabletop model easily removes atmospheric hydrocarbons and carbon contamination from SEMs, FIBs, and other vacuum chambers. The Evactron® 25Z Zephyr De-Contaminator uses a remote RF plasma to produce gas-phase radicals that flow downstream through the chamber eliminating contamination.

The Evactron® 25Z Zephyr is created for chambers that use turbo molecular pumps (TMPs). The 25Z is designed to clean/de-contaminate in the turbo pressure regime at 1-50 mTorr and has no adverse effects on the TMP temperatures. The Evactron Model 45 De-Contaminator can also be upgraded to the Zephyr cleaning.

Evactron 25Z Zephyr De-Contaminator (310 downloads)

Features & Benefits

  • Clean chambers at turbo pump pressures
  • 5-20 Watts RF power
  • ≥10x improved cleaning rate
  • One button operation
  • 1-50 mTorr operating pressure
  • No stress to the turbo molecular pump
  • Safely de-contaminates the chamber without damage to sensitive components
  • Shorter cleaning time, giving increased production with less system down time
  • Cleans chamber while in “pump down”
  • Increased mean free path, yet ion damage free