Nanoprobing SEM Solution Package

Intuitive in situ low current electrical measurements. Characterize your nanoscale samples in the vacuum chamber of an electron microscope, at the time of their observation.

The Imina Technologies package PN14-4B-V is a unique solution for nanomanipulation and characterization of electrical devices and advanced materials at the nanometer scale.

The solution embeds four miBotTM —our famously easy-to-use and versatile piezoactuated micro robots— allowing you to independently position the probes over millimeter scale samples with a resolution down to the nanometer.

Nanoprobing SEM Solution Package (160 downloads)

Electrical characterization of nanostructures

Specifically designed for low current measurements, leakage currents can be as low as 100 fA/V. Electrical characterization of nanostructures can be carried out with third party signal analyzers through the shielded cabling, featuring an excellent signal-to-noise ratio.

A set of adapters is provided with the package and enables to retrofit virtually any SEM, even those with a small chamber. In fact, with a diameter of 10 cm and a flat design, the circular robot platform gets directly mounted on the SEM sample translation stage. Installation and removal only take a few minutes and don’t require to permanently modify the hamber of your microscope.

An aperture centered on the robot platform fits various types of SEM stubs, letting you observe the specimen just like you are used to.

Key benefits
  • Faster experiments. Observe, prepare and characterize your samples at once.
  • Versatile and precise instruments. Electrical measurements and mechanical manipulation at the nanometer scale.
  • Hassle-free probe positioning. Instantly adjust the orientation to any sample geometries.
  • High mechanical stability. Move without vibration and maintain steady electrical contacts.
  • Extend the capabilities of your SEM. Retrofit even small chambers without permanent modifications.
Applications
  • Four point probing
  • I-V / C-V measurements
  • Resistivity measurements
  • Sample preparation
  • Nanohandling
  • Nanowires
  • Graphene flakes
  • Thin-film transistors
  • Carbon nanotubes
  • Nanoresonators
  • MEMS / NEMS

Technical Features

Nanoprobing SEM Solution
Number of probes 4 (PN14-4B-V) or 2 (PN14-2B-V)
Dimensions & Weight Height: 37.1 mm *
Width (without cables): 100 mm (4”) Weight: 260 g *
For a nanoprobing stage and 4 probers with coaxial cabling.
* Dimension and geometry of interface parts may vary depending of the SEM configuration
Sample size and holder Optimized for a sample with a surface area of approx. 80 mm2 (e.g. circular shape with Ø 25.4 mm (1”)).
Compatible with various SEM stubs (e.g. Ø 18 mm with pin Ø 3.2 mm and length 6 mm)
Compatible SEMs Majority of EM chambers from Zeiss, FEI, Hitachi, JEOL, Tescan, …
User interface Computer software application (Microsoft® Windows) and control pad
Probers (miBotTM BT-11-VP)
Degrees of freedom 4 independently driven (X,Y,R,Z) per probe
Motion range Stepping (XY,R,Z): 20 x 20 mm2, ± 180°, 42°
Scanning (X,Y,Z): 440 x 250 x 780 nm
Max. positioning resolution Stepping: 50 nm (X, Y), 120 nm (Z)
Scanning: 1.5 nm (X, Y), 3.5 nm (Z)
Connection type 4 coaxial (CAMAC) or triaxial* (BNC) con- nectors on the SEM flange
* with triaxial cabling option
Probe tips Compatible with a wide range of probes tips with 0.51 mm (0.020”) shank diameter and various tip radii (5 nm – 10 um), materials, and lengths.

All technical specifications are approximate values.

Electrical Probing
Voltage range ± 100 V
Current range 100 fA* – 100 mA
* with triaxial cabling option
Bandwidth 25 MHz
Resistance approx. 3.5 Ω
From probe tip to flange connectors
Operating conditions
Lowest Pressure 10-7 mbar
Temperature Range 273 K to 353 K
Options
Cabling and connectors Triaxial